Samoa Digital Library
A Generic MEMS Fabrication Process Based on a Thermal Budget Approach
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| dc.contributor.author | Carlos Ramón Báez Álvarez, Álvarez, Mónico Linares Aranda, Alfonso Torres Jácome, Mario Moreno Moreno, Joel Molina Reyes, Carlos Zúñiga Islas, Wilfrido Calleja Arriaga | |
| dc.date.accessioned | 2021-12-11T10:01:50Z | |
| dc.date.available | 2021-12-11T10:01:50Z | |
| dc.date.issued | 2016 | |
| dc.identifier.uri | ${sadil.baseUrl}/handle/123456789/1884 | |
| dc.title | A Generic MEMS Fabrication Process Based on a Thermal Budget Approach | |
| dc.type | Journal |
