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A Generic MEMS Fabrication Process Based on a Thermal Budget Approach

A Generic MEMS Fabrication Process Based on a Thermal Budget Approach

Carlos Ramón Báez Álvarez, Álvarez, Mónico Linares Aranda, Alfonso Torres Jácome, Mario Moreno Moreno, Joel Molina Reyes, Carlos Zúñiga Islas, Wilfrido Calleja Arriaga
URI: ${sadil.baseUrl}/handle/123456789/1884
Date: 2016

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